OBSERVATION APPARATUS, MEASUREMENT SYSTEM AND OBSERVATION METHOD

An observation apparatus includes an imaging unit, a driving mechanism, an operation circuit and a control circuit. The imaging unit generates image data by imaging a target object. The driving mechanism moves the imaging unit to change an imaging position of the target object. The operation circuit...

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Bibliographische Detailangaben
Hauptverfasser:	KATO Shigeru, NONAKA Osamu, YAJI Tsuyoshi
Format:	Patent
Sprache:	eng
Schlagworte:	CALCULATING COMPUTING COUNTING ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY HANDLING RECORD CARRIERS IMAGE DATA PROCESSING OR GENERATION, IN GENERAL PHYSICS PICTORIAL COMMUNICATION, e.g. TELEVISION PRESENTATION OF DATA RECOGNITION OF DATA RECORD CARRIERS
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Beschreibung
Zusammenfassung:	An observation apparatus includes an imaging unit, a driving mechanism, an operation circuit and a control circuit. The imaging unit generates image data by imaging a target object. The driving mechanism moves the imaging unit to change an imaging position of the target object. The operation circuit calculates information on imaging conditions of the imaging unit based on an auxiliary information calculation image, which is image data of auxiliary information calculation light. The control circuit controls the imaging performed by the imaging unit, using the information on the imaging conditions.