METHOD AND APPARATUS FOR AVOIDING DAMAGE WHEN ANALYSING A SAMPLE SURFACE WITH A SCANNING PROBE MICROSCOPE

METHOD AND APPARATUS FOR AVOIDING DAMAGE WHEN ANALYSING A SAMPLE SURFACE WITH A SCANNING PROBE MICROSCOPE

The present application relates to a method for avoiding damage when analyzing a sample surface with a scanning probe microscope, the method comprising the step of: detecting an electrostatic interaction between a charging of the sample surface and a measuring tip of the scanning probe microscope in...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Pieper Hans Hermann, Baur Christof, Fettig Rainer
Format: Patent
Sprache:eng
Schlagworte:
APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]
MEASURING
PHYSICS
SCANNING-PROBE TECHNIQUES OR APPARATUS
TESTING
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Beschreibung
Zusammenfassung:The present application relates to a method for avoiding damage when analyzing a sample surface with a scanning probe microscope, the method comprising the step of: detecting an electrostatic interaction between a charging of the sample surface and a measuring tip of the scanning probe microscope in the course of the approach of the measuring tip to the sample surface already at a distance from the sample surface which is greater than the distance of the measuring tip when analyzing the sample surface.