DISPLAY DEVICE, AND METHOD AND APPARATUS FOR MANUFACTURING THE SAME

DISPLAY DEVICE, AND METHOD AND APPARATUS FOR MANUFACTURING THE SAME

A method for manufacturing a display device includes a first step of placing a substrate having a lower electrode formed thereon in a vacuum environment; a second step of forming in a vacuum an organic layer that includes a light emitting layer and covers the lower electrode; a third step of forming...

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Bibliographische Detailangaben
Hauptverfasser: OZAWA Hideki, TOJO Toshio, HAMADA Yuki
Format: Patent
Sprache:eng
Schlagworte:
ELECTRICITY
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Beschreibung
Zusammenfassung:A method for manufacturing a display device includes a first step of placing a substrate having a lower electrode formed thereon in a vacuum environment; a second step of forming in a vacuum an organic layer that includes a light emitting layer and covers the lower electrode; a third step of forming in a vacuum an upper electrode that covers the organic layer; a fourth step of forming in a vacuum a sealing layer that covers the upper electrode; and a cleaning step of cleaning the substrate after end of the first step before end of the fourth step.