INSPECTION TERMINAL UNIT, PROBE CARD, AND METHOD FOR MANUFACTURING INSPECTION TERMINAL UNIT
An inspection terminal unit includes at least two inspection pins, which are arrayed side by side, each of which has a contact portion at a first end of the inspection pin and a connection portion at a second end of the inspection pin, the contact portion being in contact with an inspection object e...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | An inspection terminal unit includes at least two inspection pins, which are arrayed side by side, each of which has a contact portion at a first end of the inspection pin and a connection portion at a second end of the inspection pin, the contact portion being in contact with an inspection object element and the connection portion being connected to a substrate, and a holding unit that integrally holds at least the two inspection pins. |
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