PRESSURE DETECTION UNIT AND PRESSURE SENSOR USING THE SAME

[Solving Means] A pressure detection unit includes a pressure receiving structure including a ring-shaped ring member, a receiving member facing the ring member, and a diaphragm interposed between the ring member and the receiving member, a base made of ceramic joined to the ring member to form a pr...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	TAMURA Youko, AOYAMA Tomohisa, MUKAI Motohisa
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	[Solving Means] A pressure detection unit includes a pressure receiving structure including a ring-shaped ring member, a receiving member facing the ring member, and a diaphragm interposed between the ring member and the receiving member, a base made of ceramic joined to the ring member to form a pressure receiving space between the base and the diaphragm, a semiconductor type pressure detection device installed on a side of the pressure receiving space of the base, and a terminal pin which is electrically connected to the semiconductor type pressure detection device and penetrates the base.