UNIVERSAL SERVICE CART FOR SEMICONDUCTOR SYSTEM MAINTENANCE

A service cart for storing components of a substrate processing system includes a first side configured to store a transfer plate removed from the substrate processing system. The first side includes a first mount and a second mount that are spaced apart to retain respective upper portions of the tr...

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Bibliographische Detailangaben
Hauptverfasser:	Nguyen Tony, Bernier Terrence George, Wei Joseph
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HAND-PROPELLED VEHICLES, e.g. HAND CARTS, PERAMBULATORS LAND VEHICLES FOR TRAVELLING OTHERWISE THAN ON RAILS PERFORMING OPERATIONS SEMICONDUCTOR DEVICES SLEDGES TRANSPORTING
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Beschreibung
Zusammenfassung:	A service cart for storing components of a substrate processing system includes a first side configured to store a transfer plate removed from the substrate processing system. The first side includes a first mount and a second mount that are spaced apart to retain respective upper portions of the transfer plate. Each of the first mount and the second mount includes a respective groove arranged to retain the upper portions of the transfer plate. The first side further includes a first bumper and a second bumper that are spaced apart to abut respective lower portions of the transfer plate. Each of the first bumper and the second bumper are arranged to retain a desired distance between the first side and the lower portions of the transfer plate. A second side of the service cart includes a drawer or an opening to provide access to an interior of the service cart.