NANO AVALANCHE PHOTODIODE ARCHITECTURE FOR PHOTON DETECTION

An integrated circuit includes a substrate material that includes an epitaxial layer, wherein the substrate material and the epitaxial layer form a first semiconductor material with the epitaxial layer having a first conductivity type. At least one nanowire comprising a second semiconductor material...

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Hauptverfasser: NECHAY BETTINA, BERGHMANS ANDRE, SHERWIN MARC, SINGH NARSINGH B, KAHLER DAVID, VELIADIS JOHN V, KNUTESON DAVID J, WAGNER BRIAN
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creator NECHAY BETTINA
BERGHMANS ANDRE
SHERWIN MARC
SINGH NARSINGH B
KAHLER DAVID
VELIADIS JOHN V
KNUTESON DAVID J
WAGNER BRIAN
description An integrated circuit includes a substrate material that includes an epitaxial layer, wherein the substrate material and the epitaxial layer form a first semiconductor material with the epitaxial layer having a first conductivity type. At least one nanowire comprising a second semiconductor material having a second conductivity type doped differently than the first conductivity type of the first semiconductor material forms a junction crossing region with the first semiconductor material. The nanowire and the first semiconductor material form an avalanche photodiode (APD) in the junction crossing region to enable single photon detection. In an alternative configuration, the APD is formed as a p-i-n crossing region where n represents an n-type material, i represents an intrinsic layer, and p represents a p-type material.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title NANO AVALANCHE PHOTODIODE ARCHITECTURE FOR PHOTON DETECTION
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