NANO AVALANCHE PHOTODIODE ARCHITECTURE FOR PHOTON DETECTION

An integrated circuit includes a substrate material that includes an epitaxial layer, wherein the substrate material and the epitaxial layer form a first semiconductor material with the epitaxial layer having a first conductivity type. At least one nanowire comprising a second semiconductor material...

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Bibliographische Detailangaben
Hauptverfasser: NECHAY BETTINA, BERGHMANS ANDRE, SHERWIN MARC, SINGH NARSINGH B, KAHLER DAVID, VELIADIS JOHN V, KNUTESON DAVID J, WAGNER BRIAN
Format: Patent
Sprache:eng
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Zusammenfassung:An integrated circuit includes a substrate material that includes an epitaxial layer, wherein the substrate material and the epitaxial layer form a first semiconductor material with the epitaxial layer having a first conductivity type. At least one nanowire comprising a second semiconductor material having a second conductivity type doped differently than the first conductivity type of the first semiconductor material forms a junction crossing region with the first semiconductor material. The nanowire and the first semiconductor material form an avalanche photodiode (APD) in the junction crossing region to enable single photon detection. In an alternative configuration, the APD is formed as a p-i-n crossing region where n represents an n-type material, i represents an intrinsic layer, and p represents a p-type material.