ADHESIVE FILM FOR SEMICONDUCTOR CHIP WITH THROUGH ELECTRODE

The present invention relates to an adhesive film for a semiconductor chip with a through electrode, to be used for stacking multiple semiconductor chips each with a through electrode on a semiconductor wafer, the adhesive film having a minimum melt viscosity of 50 to 2500 Pa·s and a thixotropic ind...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: TAKEDA Kohei, NAGATA Mai, ENAMI Toshio
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The present invention relates to an adhesive film for a semiconductor chip with a through electrode, to be used for stacking multiple semiconductor chips each with a through electrode on a semiconductor wafer, the adhesive film having a minimum melt viscosity of 50 to 2500 Pa·s and a thixotropic index at 140° C. of 8 or lower.