POLISHING COMPOSITION

Proposed is a polishing composition including hydroxyethyl cellulose, water and abrasive grains, wherein the hydroxyethyl cellulose has a molecular weight of 500,000 or more and 1,500,000 or less, and the proportion of the hydroxyethyl cellulose adsorbed to the abrasive grains is 30% or more and 90%...

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Bibliographische Detailangaben
Hauptverfasser: MIYAMOTO Akiko, HABA Shinichi, SUGITA Noriaki, TERAMOTO Masashi, NAKAUCHI Tatsuya
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Proposed is a polishing composition including hydroxyethyl cellulose, water and abrasive grains, wherein the hydroxyethyl cellulose has a molecular weight of 500,000 or more and 1,500,000 or less, and the proportion of the hydroxyethyl cellulose adsorbed to the abrasive grains is 30% or more and 90% or less.