Fluorinated and Hydrogenated Diamond-Like Carbon Materials for Anti-Reflective Coatings

Fluorinated and hydrogenated diamond-like carbon ("DLC-FH") that have unique optical properties differ as a class from the existing DLC art, whose refractive indices [n] are limited to rather high values above a lower threshold of 1.7, and can range up to about 2.7. The DLC-FH materials ca...

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Bibliographische Detailangaben
Hauptverfasser:	Haubold Lars (nmn), Slagter John Thomas, Schuelke Thomas (nmn), Tsu David V
Format:	Patent
Sprache:	eng
Schlagworte:	ADHESIVES BASIC ELECTRIC ELEMENTS CHEMICAL PAINT OR INK REMOVERS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING COMPOSITIONS, e.g. PAINTS, VARNISHES ORLACQUERS COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL CORRECTING FLUIDS DIFFUSION TREATMENT OF METALLIC MATERIAL DYES ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY FILLING PASTES INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL INKS METALLURGY MISCELLANEOUS APPLICATIONS OF MATERIALS MISCELLANEOUS COMPOSITIONS NATURAL RESINS OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PAINTS PASTES OR SOLIDS FOR COLOURING OR PRINTING PHYSICS POLISHES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION USE OF MATERIALS THEREFOR WOODSTAINS
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Beschreibung
Zusammenfassung:	Fluorinated and hydrogenated diamond-like carbon ("DLC-FH") that have unique optical properties differ as a class from the existing DLC art, whose refractive indices [n] are limited to rather high values above a lower threshold of 1.7, and can range up to about 2.7. The DLC-FH materials can achieve very low refractive indices at 550 nm wavelength. [n550], i.e., below 1.5, and especially demonstrated down to 1.3. Moreover, whereas the absorption for the existing DLC art, as quantified by the extinction coefficient [k] at a wavelength of 550 nm, [k550], is limited to about 0.04, our DLC-FH material can achieve [k550] below 0.01. Both of these attributes, i.e., low [n550] and low [k550) means that, for the first time, a carbon-based material as represented by the DLC-FH material, can be used for anti-reflection (AR) coating.