Apparatus and Method for Spectroscopic Analysis of Residue

One example of the present disclosure relates to an apparatus for spectroscopic analysis of residue. The apparatus includes a surface including a hydrophobic portion and a hydrophilic portion. The hydrophobic portion surrounds the hydrophilic portion. The hydrophilic portion includes a dimension equ...

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1. Verfasser: Vahey Paul G
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:One example of the present disclosure relates to an apparatus for spectroscopic analysis of residue. The apparatus includes a surface including a hydrophobic portion and a hydrophilic portion. The hydrophobic portion surrounds the hydrophilic portion. The hydrophilic portion includes a dimension equal to or larger than a width of a first incident non-destructive electromagnetic beam.