THIN FILM FABRICATING DEVICE AND METHOD FOR MANUFACTURING ORGANIC LIGHT EMITTING DEVICE USING THE SAME

A thin-film forming device includes a plurality of electrodes for spraying a thin-film forming material; and a substrate stand disposed to face the plurality of pipe electrodes and which holds a substrate for forming a thin film thereon, where a gas spraying channel for spraying gas for drying the s...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	HAMAMOTO Nobuo, MIYAZAKI Hiroshi
Format:	Patent
Sprache:	eng
Schlagworte:	APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL ATOMISING APPARATUS ELECTRICITY NOZZLES PERFORMING OPERATIONS SPRAYING APPARATUS SPRAYING OR ATOMISING IN GENERAL TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	A thin-film forming device includes a plurality of electrodes for spraying a thin-film forming material; and a substrate stand disposed to face the plurality of pipe electrodes and which holds a substrate for forming a thin film thereon, where a gas spraying channel for spraying gas for drying the sprayed thin-film forming material is defined in each of the electrodes, and when a gap among neighboring electrodes is denoted by L and a shortest distance to the held substrate from the electrodes is denoted by Z, L and Z satisfy the following inequation Z≧5L.