PREDICTIVE CAPABILITY FOR ELECTROPLATING SHIELD DESIGN
A method including running a simulated plating process on a substrate using a base shield, the base shield including a plurality of openings therethrough defining an array including two coordinates; after running the simulated plating process, determining if a predetermined criterion for the simulat...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A method including running a simulated plating process on a substrate using a base shield, the base shield including a plurality of openings therethrough defining an array including two coordinates; after running the simulated plating process, determining if a predetermined criterion for the simulated plating process is satisfied; and if the predetermined criterion is not satisfied, adjusting one or more of the plurality of openings. A machine readable medium including program instructions that when executed by a controller cause the controller to perform a method including running a simulated plating process on a substrate using a base shield, the base shield including a plurality of openings therethrough defining an array including two coordinates; after running the simulated plating process, determining if a predetermined criterion for the simulated plating process is satisfied; and if the predetermined criterion is not satisfied, adjusting one or more of the plurality of openings. |
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