SUBSTRATE INSPECTION DEVICE AND METHOD THEREOF

A substrate inspection device is provided, which includes a main body, a bearing module, an illuminating and camera module and a control module. A mask is held by the bearing module, which has an opening. The illuminating and image capturing module is disposed on the lifting unit. After receiving th...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	CHANG CHIHIANG
Format:	Patent
Sprache:	eng
Schlagworte:	CALCULATING COMPUTING COUNTING ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY IMAGE DATA PROCESSING OR GENERATION, IN GENERAL PHYSICS PICTORIAL COMMUNICATION, e.g. TELEVISION
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