SUBSTRATE INSPECTION DEVICE AND METHOD THEREOF

A substrate inspection device is provided, which includes a main body, a bearing module, an illuminating and camera module and a control module. A mask is held by the bearing module, which has an opening. The illuminating and image capturing module is disposed on the lifting unit. After receiving the first detecting signal, the control module accordingly drives the lifting unit to shift towards the first direction, such that the illuminating and image capturing module moves closer to the substrate. The control module then controls the shifting unit to drive the light-emitting component to project a first spot-light on the substrate through the opening, and controls the shifting unit to move by a step manner so as to carry the bearing module. The control module also controls the illuminating and image capturing module to capture images the first regions of the substrate and to generate the first images.