WAFER TRANSFER MICROCLIMATE TECHNIQUES AND APPARATUSES, INCLUDING HORIZONTAL SLOT IMPLEMENTATIONS AND/OR TRAVELLING SHOWERHEADS

Systems and techniques for forming buffer gas microclimates around semiconductor wafers in environments external to a semiconductor processing chamber are disclosed. Such systems may include slot doors that may allow for single wafers to be removed from a multi-wafer stack while limiting outflow of...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Blank Richard M, van Gogh James Stephen, Witkowicki Derek John, Gould Richard Howard, Quiles Efrain, Salek Mohsen, Senn Brandon, Kristoffersen Candi, Singh Harmeet
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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