MEMS DEVICES ON FLEXIBLE SUBSTRATE

A flexible film including one or more MEMS elements and articles including the flexible film are described. The flexible film includes a polymer layer between two metal layers with one of the metal layers containing a perforation. The polymer layer includes voided regions that allow for relative mov...

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Bibliographische Detailangaben
Hauptverfasser:	Gundel Douglas B, Palaniswamy Ravi, Foo Siang Sin, Geissinger John D, Lunceford Brent D, Mooney Justine A, Bergeron Phillip J
Format:	Patent
Sprache:	eng
Schlagworte:	MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS TRANSPORTING
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Beschreibung
Zusammenfassung:	A flexible film including one or more MEMS elements and articles including the flexible film are described. The flexible film includes a polymer layer between two metal layers with one of the metal layers containing a perforation. The polymer layer includes voided regions that allow for relative movement of the two metal layers.