ORGANIC LIGHT EMITTING DEVICE AND MANUFACTURING METHOD OF THE SAME USING THIN FILM FABRICATING APPARATUS

A thin film fabricating apparatus includes an electrode part which sprays a thin film material as electrified spray particles, a substrate holder disposed facing the electrode part and holding a substrate to be provided with a thin film, and a mask disposed between the electrode part and the substra...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	HAMAMOTO Nobuo, HIROSHI Miyazaki
Format:	Patent
Sprache:	eng
Schlagworte:	APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL ATOMISING APPARATUS ELECTRICITY NOZZLES PERFORMING OPERATIONS SPRAYING APPARATUS SPRAYING OR ATOMISING IN GENERAL TRANSPORTING
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Beschreibung
Zusammenfassung:	A thin film fabricating apparatus includes an electrode part which sprays a thin film material as electrified spray particles, a substrate holder disposed facing the electrode part and holding a substrate to be provided with a thin film, and a mask disposed between the electrode part and the substrate holder and provided with a plurality of pattern grooves, where the mask and the substrate are applied with a mask voltage (Vm) and a substrate voltage (V0), respectively, the mask voltage (Vm) is a variable voltage, and the substrate voltage (V0) has the same polarity as the polarity of spray particles.