SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

A semiconductor device includes a first semiconductor region of a first conductivity type, a second semiconductor region of the first conductivity type, a third semiconductor region of the second conductivity type, and an insulating portion. The second semiconductor region is provided on the first s...

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Hauptverfasser: JIMBO Sadayuki, OKUMURA Hideki, YAMAGUCHI Takuya, TSUCHITANI Masanobu
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creator JIMBO Sadayuki
OKUMURA Hideki
YAMAGUCHI Takuya
TSUCHITANI Masanobu
description A semiconductor device includes a first semiconductor region of a first conductivity type, a second semiconductor region of the first conductivity type, a third semiconductor region of the second conductivity type, and an insulating portion. The second semiconductor region is provided on the first semiconductor region. The third semiconductor region is provided on the second semiconductor region. The insulating portion is located in a vicinity of, and contacts, the second semiconductor region and the third semiconductor region, and the insulating portion includes a plurality of voids therein, the plurality of voids extending around the second semiconductor region.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
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