COUPLING DEVICES AND SOURCE ASSEMBLIES INCLUDING THEM

Certain embodiments described herein are directed to couplers that can be used to provide a seal between a source assembly and a vacuum chamber. In certain examples, the seal can be provided upon movement of a moveable component of the coupler. In some examples, rotation of the moveable component is...

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Bibliographische Detailangaben
1. Verfasser:	Ferrara Keith
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS BLASTING DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS ORMACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS,CLIPS, WEDGES, JOINTS OR JOINTING ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING LIGHTING MECHANICAL ENGINEERING THERMAL INSULATION IN GENERAL WEAPONS
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Beschreibung
Zusammenfassung:	Certain embodiments described herein are directed to couplers that can be used to provide a seal between a source assembly and a vacuum chamber. In certain examples, the seal can be provided upon movement of a moveable component of the coupler. In some examples, rotation of the moveable component is operative to provide an axial force to a stationary component coupled to the moveable component such that the stationary component is biased to provide a suitable seal to the vacuum chamber.