APPARATUS FOR ATTACHING PELLICLE

Apparatuses for attaching pellicle may be provided. For example, a pellicle attaching apparatus includes a lower supporter supporting a lower surface of a pellicle, an upper supporter supporting an upper surface of a reticle such that a lower surface of the reticle is in contact with a pellicle fram...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
1. Verfasser:	JEONG HAE-YOUNG
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	Apparatuses for attaching pellicle may be provided. For example, a pellicle attaching apparatus includes a lower supporter supporting a lower surface of a pellicle, an upper supporter supporting an upper surface of a reticle such that a lower surface of the reticle is in contact with a pellicle frame disposed on an upper surface of the pellicle, and a first sound wave generator disposed on the upper surface of the reticle to irradiate ultrasonic waves onto the upper surface of the reticle.