INTEGRATED CHANNEL DIODE

A semiconductor device includes a vertical drift region over a drain contact region, abutted on opposite sides by RESURF trenches. A split gate is disposed over the vertical drift region. A first portion of the split gate is a gate of an MOS transistor and is located over a body of the MOS transisto...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Molloy Simon John, Neilson John Manning Savidge, Kocon Christopher Boguslaw, Kawahara Hideaki
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A semiconductor device includes a vertical drift region over a drain contact region, abutted on opposite sides by RESURF trenches. A split gate is disposed over the vertical drift region. A first portion of the split gate is a gate of an MOS transistor and is located over a body of the MOS transistor over a first side of the vertical drift region. A second portion of the split gate is a gate of a channel diode and is located over a body of the channel diode over a second, opposite, side of the vertical drift region. A source electrode is electrically coupled to a source region of the channel diode and a source region of the MOS transistor.