PIEZOELECTRIC DRIVE DEVICE AND ROBOT

A piezoelectric drive device includes a plurality of piezoelectric vibrating portions that drive a driven member. A difference between the maximum resonance frequency and the minimum resonance frequency in each resonance frequency of the plurality of piezoelectric vibrating portions falls within a r...

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Bibliographische Detailangaben
1. Verfasser: MIYAZAWA Osamu
Format: Patent
Sprache:eng
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Zusammenfassung:A piezoelectric drive device includes a plurality of piezoelectric vibrating portions that drive a driven member. A difference between the maximum resonance frequency and the minimum resonance frequency in each resonance frequency of the plurality of piezoelectric vibrating portions falls within a range of 0.001% to 5% of an average resonance frequency of the plurality of piezoelectric vibrating portions.