DRIVE APPARATUS
A mirror device 300 disclosed herein includes: a base 302; a mirror 305; an actuator 306; an extension 304 provided on the other side of the mirror 305 with respect to an X-axis opposite from the actuator 306; a fixed comb electrode 308; and a movable comb electrode 307 provided on the other side of...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A mirror device 300 disclosed herein includes: a base 302; a mirror 305; an actuator 306; an extension 304 provided on the other side of the mirror 305 with respect to an X-axis opposite from the actuator 306; a fixed comb electrode 308; and a movable comb electrode 307 provided on the other side of the mirror 305 with respect to the X-axis opposite from the actuator 306. The movable comb electrode 307 includes: a beam portion 371 coupled to the mirror 305 via a hinge 373; and electrode fingers 372 provided for the beam portion 371. The extension 304 is coupled to the base 302 via a hinge 341, and the mirror 305 tilts around a principal axis passing through the hinge 341. |
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