MICROFABRICATED ELASTOMERIC VALVE AND PUMP SYSTEMS

A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a se...

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Bibliographische Detailangaben
Hauptverfasser:	Hansen Carl L, Scherer Axel, Chou Hou-Pu, Quake Stephen R, Unger Marc Alexander, Thorsen Todd A, Adams Mark L, Enzelberger Markus
Format:	Patent
Sprache:	eng
Schlagworte:	ACTUATING-FLOATS BEER BIOCHEMISTRY BLASTING BOTTLES, JARS OR SIMILAR CONTAINERS CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE CHEMISTRY COCKS COMPOSITIONS OR TEST PAPERS THEREFOR CONDITION-RESPONSIVE CONTROL IN MICROBIOLOGICAL ORENZYMOLOGICAL PROCESSES DEVICES FOR VENTING OR AERATING DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISEPROVIDED FOR ENGINEERING ELEMENTS AND UNITS ENZYMOLOGY FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING ORCONTROL PURPOSES FLUID-PRESSURE ACTUATORS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING HYDRAULICS OR PNEUMATICS IN GENERAL LIGHTING LIQUID HANDLING MEASURING OR TESTING PROCESSES INVOLVING ENZYMES, NUCLEICACIDS OR MICROORGANISMS MECHANICAL ENGINEERING METALLURGY MICROBIOLOGY MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY MUTATION OR GENETIC ENGINEERING OPENING, CLOSING PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PROCESSES OF PREPARING SUCH COMPOSITIONS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS PUMPS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS SPIRITS TAPS THERMAL INSULATION IN GENERAL TRANSPORTING VALVES VINEGAR WEAPONS WINE
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Beschreibung
Zusammenfassung:	A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.