FLEXIBLE ELEMENTS FOR PROBES AND GUARD RINGS

In one general aspect, an apparatus can include a probe including an exterior probe element including a first plurality of links defining a first flexible element. The exterior probe element can define a guard ring. The probe can also include an interior probe element including a second plurality of...

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Bibliographische Detailangaben
Hauptverfasser:	GUTHRIE William S, BARTON Jeffrey D, MAZZEO Brian A, BAXTER Jared
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	In one general aspect, an apparatus can include a probe including an exterior probe element including a first plurality of links defining a first flexible element. The exterior probe element can define a guard ring. The probe can also include an interior probe element including a second plurality of links defining a second flexible element and disposed within at least a portion of a perimeter defined by the exterior probe element. The apparatus can also include a waveform generator electrically coupled to the exterior probe element and the interior probe element.