MICROMECHANICAL COMPONENT HAVING A SPLIT, GALVANICALLY ISOLATED ACTIVE STRUCTURE, AND METHOD FOR OPERATING SUCH A COMPONENT

A micromechanical component comprises a substrate and an active structure which can be deflected in at least one direction relative to the substrate and which has at least a first region and a second region, wherein the first region and the second region are electrically conductive and are rigidly p...

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Bibliographische Detailangaben
1. Verfasser:	SPAHLINGER GUENTER
Format:	Patent
Sprache:	eng
Schlagworte:	GYROSCOPIC INSTRUMENTS MEASURING MEASURING DISTANCES, LEVELS OR BEARINGS MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY NAVIGATION PERFORMING OPERATIONS PHOTOGRAMMETRY OR VIDEOGRAMMETRY PHYSICS SURVEYING TESTING TRANSPORTING
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Beschreibung
Zusammenfassung:	A micromechanical component comprises a substrate and an active structure which can be deflected in at least one direction relative to the substrate and which has at least a first region and a second region, wherein the first region and the second region are electrically conductive and are rigidly physically connected to one another along a first axis and are electrically insulated from one another by an insulating region. In a method for operating the component, different potentials are applied to the first region and the second region, wherein charges or changes in capacitance brought about by the movement of the active structure can be detected.