VACUUM PUMP SYSTEM INCLUDING SCROLL PUMP AND SECONDARY PUMPING MECHANISM

A vacuum pump system includes a secondary pumping mechanism incorporated into a stationary portion of a scroll pump. The stationary portion includes the stationary plate scroll of the scroll pump and defines a gas passageway in which the secondary pumping mechanism is disposed. The gas passageway is...

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Bibliographische Detailangaben
1. Verfasser:	Forni Ronald J
Format:	Patent
Sprache:	eng
Schlagworte:	BLASTING HEATING LIGHTING MECHANICAL ENGINEERING POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENTMACHINES FOR LIQUIDS ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENTPUMPS WEAPONS
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Beschreibung
Zusammenfassung:	A vacuum pump system includes a secondary pumping mechanism incorporated into a stationary portion of a scroll pump. The stationary portion includes the stationary plate scroll of the scroll pump and defines a gas passageway in which the secondary pumping mechanism is disposed. The gas passageway is connected to a gas flow path through the scroll pump at a location upstream of an exhaust check valve of the scroll pump. The secondary pumping mechanism is displaceable within the gas passageway to draw residual gas in the compression stage upstream of the check valve into the gas passageway, and may pump the residual gas back out through the exhaust check valve, to evacuate residual gas from the compression stage.