METHOD FOR SPLITTING CIRCLES

The present invention relates to a method for splitting circles, and the method is mainly applied to a wafer of semiconductors. A plurality of splitting blades are disposed above the wafer, and conditions and steps are set for switching the plurality of splitting blades based on a safe distance valu...

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Bibliographische Detailangaben
Hauptverfasser:	CHENG JUI-HUAI, LIU WEN-MING, WU CHAOING, CHANG CHING-TSUNG
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS SEMICONDUCTOR DEVICES TRANSPORTING WORKING CEMENT, CLAY, OR STONE WORKING STONE OR STONE-LIKE MATERIALS
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Beschreibung
Zusammenfassung:	The present invention relates to a method for splitting circles, and the method is mainly applied to a wafer of semiconductors. A plurality of splitting blades are disposed above the wafer, and conditions and steps are set for switching the plurality of splitting blades based on a safe distance value set at an outer edge of a wafer or a safe distance value set at an inner edge of a metal ring. Accordingly, the plurality of splitting blades are prevented from cutting an outer frame during splitting and failing to complete actions of splitting wafers. The method has an advantage of efficiency of enhancing a production capacity yield rate.