MICROELECTROMECHANICAL SYSTEM FOR TUNING LASERS

The invention relates to a micromechanically produced optical device, comprising: a carrier (2) for carrying the micromechanically produced device (1); a diffraction grating (3) for diffracting light (LI); a plate (4) for carrying the diffraction grating (3); and a deflecting apparatus (5, 6; 6, 18,...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	OSTENDORF Ralf, RATTUNDE Marcel, SCHENK Harald, GRAHMANN Jan, WAGNER Joachim
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS COLORIMETRY DEVICES USING STIMULATED EMISSION ELECTRICITY MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICS RADIATION PYROMETRY TESTING TRANSPORTING
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Beschreibung
Zusammenfassung:	The invention relates to a micromechanically produced optical device, comprising: a carrier (2) for carrying the micromechanically produced device (1); a diffraction grating (3) for diffracting light (LI); a plate (4) for carrying the diffraction grating (3); and a deflecting apparatus (5, 6; 6, 18, 19) for deflecting (PT, PR) the plate (4) in relation to the carrier (2), wherein the deflecting apparatus (5, 6; 6, 18, 19) has a bearing apparatus (5; 18, 19) for movably supporting the plate (4) and a drive apparatus (6) for moving the plate (4); wherein the deflecting apparatus (5, 6; 6, 18, 19) is designed to rotationally deflect (PR) the plate (4) and to translationally deflect (PT) the plate (4).