RECESSED CONTACT TO SEMICONDUCTOR NANOWIRES

A semiconductor nanowire device includes at least one semiconductor nanowire having a bottom surface and a top surface, an insulating material which surrounds the semiconductor nanowire, and an electrode ohmically contacting the top surface of the semiconductor nanowire. A contact of the electrode t...

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Bibliographische Detailangaben
Hauptverfasser: Åberg Ingvar, Magnusson Martin, Asoli Damir, Samuelson Lars Ivar, Ohlsson Jonas
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A semiconductor nanowire device includes at least one semiconductor nanowire having a bottom surface and a top surface, an insulating material which surrounds the semiconductor nanowire, and an electrode ohmically contacting the top surface of the semiconductor nanowire. A contact of the electrode to the semiconductor material of the semiconductor nanowire is dominated by the contact to the top surface of the semiconductor nanowire.