SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

A semiconductor device includes a charge storage pattern on a substrate, a blocking insulating pattern on the charge storage pattern, and a control gate structure on the blocking insulating pattern, the control gate structure having a metal electrode pattern, and an oxidation prevention pattern on t...

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Bibliographische Detailangaben

Hauptverfasser:	HAN Hauk, SOHN Yeon-Sil
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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