SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

A semiconductor device includes a charge storage pattern on a substrate, a blocking insulating pattern on the charge storage pattern, and a control gate structure on the blocking insulating pattern, the control gate structure having a metal electrode pattern, and an oxidation prevention pattern on t...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: HAN Hauk, SOHN Yeon-Sil
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A semiconductor device includes a charge storage pattern on a substrate, a blocking insulating pattern on the charge storage pattern, and a control gate structure on the blocking insulating pattern, the control gate structure having a metal electrode pattern, and an oxidation prevention pattern on the metal electrode pattern, the oxidation prevention pattern including a metallic nitride.