SENSOR

According to embodiments, a sensor includes a structure body, a container, a liquid and a sensing unit. The structure body includes a supporter, and a film unit. The film unit includes a first region. The first region includes a first end portion supported by the supporter, and a first portion being...

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Bibliographische Detailangaben
Hauptverfasser: SHIMOYAMA Isao, Nguyen Minh Dung, Nguyen Binh Khiem, Tamura Hiroto, Takahashi Hidetoshi, Nishimura Osamu, Kasahara Akihiro, Matsumoto Kiyoshi, Pham Quang Khang, Omori Takahiro
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:According to embodiments, a sensor includes a structure body, a container, a liquid and a sensing unit. The structure body includes a supporter, and a film unit. The film unit includes a first region. The first region includes a first end portion supported by the supporter, and a first portion being displaceable. The film unit includes an opening. The container is connected to the structure body. A first space is defined between the film unit and the container. The liquid is provided inside the first space. The sensing unit senses a displacement of the first portion accompanying a displacement of the liquid.