METHOD FOR PRODUCING POROUS POLYMER FILM

The method of the present disclosure includes: (I) irradiating a polymer film (1) with an ion beam composed of ions (2) accelerated in a cyclotron so as to form a polymer film that has collided with the ions in the beam; and (II) chemically etching the polymer film formed in the irradiation (I) so a...

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Hauptverfasser: NAGAI Yozo, YAMAKI Tetsuya, MAEKAWA Yasunari, MURAKI Yuuzou, YUYAMA Takahiro, ISHIBORI Ikuo, KOSHIKAWA Hiroshi, YURI Yosuke, ISHIZAKA Tomohisa, AMINO Ichiro, ASANO Masaharu, FURUYAMA Satoru, YOSHIDA Ken-ichi
Format: Patent
Sprache:eng
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Zusammenfassung:The method of the present disclosure includes: (I) irradiating a polymer film (1) with an ion beam composed of ions (2) accelerated in a cyclotron so as to form a polymer film that has collided with the ions in the beam; and (II) chemically etching the polymer film formed in the irradiation (I) so as to form openings (4b) and/or through holes (4a) corresponding to tracks (3) left by the colliding ions in the polymer film. In the irradiation (I), a beam current value of the ion beam is detected upstream and/or downstream of the polymer film in a path of the ion beam, and an irradiation conditioning factor in the irradiation of the polymer film with the ion beam is controlled based on the detected beam current value so that the polymer film can be irradiated with the ions at a predetermined irradiation density. The method of the present disclosure is suitable for industrial production of porous polymer films.