Composition for Treating Surface of Substrate, Method and Device

Treatment compositions and methods of treating the surface of a substrate by using the treatment composition, and a semiconductor or MEMS substrate having the treatment composition thereon.

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Bibliographische Detailangaben
Hauptverfasser: Vrtis Raymond Nicholas, Brown Mark Richard, Chen Tianniu, Casteel, JR. William Jack, Inaoka Seiji, Theodorou Kathleen Esther
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:Treatment compositions and methods of treating the surface of a substrate by using the treatment composition, and a semiconductor or MEMS substrate having the treatment composition thereon.