Reconstruction Of Scanning Probe Microscopy Cantilever Tip

Reconstruction Of Scanning Probe Microscopy Cantilever Tip

A method for reconstructing a scanning probe microscopy (SPM) cantilever tip using focused ion beam (FIB) milling, such as reconstructing an atomic force microscopy (AFM) tip for reuse, involves mounting a used cantilever with tip and tip point on a FIB stub cantilever holder, thereby exposing the t...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Borromeo Noreen Grace A, Lopez Jessica Irish D, Rato Jovy Anne V
Format: Patent
Sprache:eng
Schlagworte:
APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
MEASURING
PHYSICS
SCANNING-PROBE TECHNIQUES OR APPARATUS
TESTING
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Beschreibung
Zusammenfassung:A method for reconstructing a scanning probe microscopy (SPM) cantilever tip using focused ion beam (FIB) milling, such as reconstructing an atomic force microscopy (AFM) tip for reuse, involves mounting a used cantilever with tip and tip point on a FIB stub cantilever holder, thereby exposing the tip. A milling pattern is created on one or on both of a first side and a second side of the tip point, and the one or both sides of the tip point is/are FIB-milled according to the respective milling pattern, thereby creating a reconstructed tip for reuse rather than disposal.