MEASUREMENT OF CRITICAL DIMENSIONS OF NANOSTRUCTURES USING X-RAY GRAZING INCIDENCE IN-PLANE DIFFRACTION

MEASUREMENT OF CRITICAL DIMENSIONS OF NANOSTRUCTURES USING X-RAY GRAZING INCIDENCE IN-PLANE DIFFRACTION

The manufactured structure is illuminated with an x-ray beam. The manufactured structure is positioned at a selected grazing angle and a selected rotation angle with respect to the x-ray beam. The selected rotation angle has been selected to enhance in-plane diffraction of reflections of the x-ray b...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Loewen Roderick J, Gifford Martin A, Ruth Ronald D
Format: Patent
Sprache:eng
Schlagworte:
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The manufactured structure is illuminated with an x-ray beam. The manufactured structure is positioned at a selected grazing angle and a selected rotation angle with respect to the x-ray beam. The selected rotation angle has been selected to enhance in-plane diffraction of reflections of the x-ray beam by the manufactured structure. A grazing in-plane diffraction beam produced by interference with the periodic feature is detected. A property of the grazing in-plane diffraction beam is determined by the critical dimension.