FLUIDIZED BED ATOMIC LAYER DEPOSITION DEVICE FOR MANUFACTURING NANOCOATING PARTICLES

Disclosed is a fluidized bed atomic layer deposition device for manufacturing nanocoating particles. A fluidized bed atomic layer deposition device according to an embodiment of the present invention comprises: a fluidized bed reactor, into which particles to be coated are injected; a reaction mater...

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Hauptverfasser: LEE Jaeyoung, CHUNG Sang Ho, KIM Jin Won, LEE Jae Kwang, JU Hyungkuk
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Sprache:eng
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creator LEE Jaeyoung
CHUNG Sang Ho
KIM Jin Won
LEE Jae Kwang
JU Hyungkuk
description Disclosed is a fluidized bed atomic layer deposition device for manufacturing nanocoating particles. A fluidized bed atomic layer deposition device according to an embodiment of the present invention comprises: a fluidized bed reactor, into which particles to be coated are injected; a reaction material supply unit for supplying reaction gases for coating the particles to be coated into the fluidized bed reactor; and a vibration pump coupled to the fluidized bed reactor such that the reaction gases can move therethrough, the vibration pump giving the reaction gasses regular vibration and thereby forming a turbulence inside the fluidized bed reactor.
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subjects BLASTING
CHEMICAL SURFACE TREATMENT
CHEMISTRY
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING MATERIAL WITH METALLIC MATERIAL
COATING METALLIC MATERIAL
DIFFUSION TREATMENT OF METALLIC MATERIAL
HEATING
INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL
LIGHTING
MECHANICAL ENGINEERING
METALLURGY
POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS
PUMPS
PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
WEAPONS
title FLUIDIZED BED ATOMIC LAYER DEPOSITION DEVICE FOR MANUFACTURING NANOCOATING PARTICLES
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