FLUIDIZED BED ATOMIC LAYER DEPOSITION DEVICE FOR MANUFACTURING NANOCOATING PARTICLES
Disclosed is a fluidized bed atomic layer deposition device for manufacturing nanocoating particles. A fluidized bed atomic layer deposition device according to an embodiment of the present invention comprises: a fluidized bed reactor, into which particles to be coated are injected; a reaction mater...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | Disclosed is a fluidized bed atomic layer deposition device for manufacturing nanocoating particles. A fluidized bed atomic layer deposition device according to an embodiment of the present invention comprises: a fluidized bed reactor, into which particles to be coated are injected; a reaction material supply unit for supplying reaction gases for coating the particles to be coated into the fluidized bed reactor; and a vibration pump coupled to the fluidized bed reactor such that the reaction gases can move therethrough, the vibration pump giving the reaction gasses regular vibration and thereby forming a turbulence inside the fluidized bed reactor. |
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