STORAGE MEDIUM VACUUM SPUTTER TOOL ADJUSTABLE IDLER

A coating apparatus for magnetic data storage disks is operable to transport a disk in a disk holding fixture from a first coating area to a second coating area via roller wheels along a first path. A wheel located along the first path between the first coating area and the second coating area withi...

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Bibliographische Detailangaben
Hauptverfasser:	Tanaka Samuel L, Tong ChunWai Joseph, Greenberg Thomas L
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INFORMATION STORAGE INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PHYSICS SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	A coating apparatus for magnetic data storage disks is operable to transport a disk in a disk holding fixture from a first coating area to a second coating area via roller wheels along a first path. A wheel located along the first path between the first coating area and the second coating area within a sealed enclosure is adjusted such that deflection of the disk holding fixture when traversing the disk transport wheel is reduced, such as by adjusting a leadscrew coupled to the disk holding fixture and a frame of the disk coating apparatus. Adjustment is made with the disk coating apparatus sealed and under vacuum, as the position of the disk transport wheel being adjusted may be different under vacuum than under atmospheric pressure. Adjustment is verified by processing a test disk and measuring forces applied to the test disk during transport through the disk coating apparatus.