LINE WIDTH ERROR OBTAINING METHOD, LINE WIDTH ERROR OBTAINING APPARATUS, AND INSPECTION SYSTEM

LINE WIDTH ERROR OBTAINING METHOD, LINE WIDTH ERROR OBTAINING APPARATUS, AND INSPECTION SYSTEM

Optical image data is acquired by irradiating a pattern with light emitted from a light source. A threshold value is specified by internally dividing a minimum value and a maximum value of a signal amount of reference image data by a division ratio. A position corresponding to a signal amount of a t...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: INOUE Kazuhiko, NUKADA Hideki, HASHIMOTO Hideaki
Format: Patent
Sprache:eng
Schlagworte:
CALCULATING
COMPUTING
COUNTING
IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
PHYSICS
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Beschreibung
Zusammenfassung:Optical image data is acquired by irradiating a pattern with light emitted from a light source. A threshold value is specified by internally dividing a minimum value and a maximum value of a signal amount of reference image data by a division ratio. A position corresponding to a signal amount of a threshold value is determined as an edge of a pattern of the reference image data. A position of a signal amount equal to the threshold value is determined as an edge of the pattern of the optical image data. A line width error is obtained as a difference between a first line width of the optical image data and a second line width of the reference image data. A new threshold value is specified in the case of fluctuation of a light quantity of the light source or decrease of a contrast value of the optical image data.