TRANSFER DEVICE AND VACUUM APPARATUS

The present invention provides a system that facilitates positioning operations and also improves throughput in transferring a substrate in a transfer device that can transfer a pair of transfer objects simultaneously. The present invention includes first and second extension/contraction drive shafts disposed concentrically with a rotating axis as a center, each provided in an independently rotatable manner in a horizontal plane, and first and second turning drive shafts. First and second transfer mechanisms are disposed on both sides of a transfer object transfer direction with the rotating axis being disposed therebetween, are driven to extend and contract by the first and second extension/contraction drive shafts, and transfer a transfer object along the transfer object transfer direction. The first and second transfer mechanisms are configured to turn at a small angle with the rotating axis as a center by first and second turning drive members.