APPARATUS FOR DETERMINING AN OPTICAL PROPERTY OF AN OPTICAL IMAGING SYSTEM

An apparatus (10) determining an optical property of an imaging system (12) includes an illumination system (20) directing electromagnetic radiation (18) onto an object plane (22) of the imaging system, a utilization detector (42) determining the optical property, an output coupling device (46), and...

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Bibliographische Detailangaben
Hauptverfasser: HAIDNER HELMUT, EHRMANN ALBRECHT, GOEPPERT MARKUS
Format: Patent
Sprache:eng
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Zusammenfassung:An apparatus (10) determining an optical property of an imaging system (12) includes an illumination system (20) directing electromagnetic radiation (18) onto an object plane (22) of the imaging system, a utilization detector (42) determining the optical property, an output coupling device (46), and an intensity sensor (50). The detector captures the radiation after it has traveled along a utilized beam path (45) extending to the utilization detector. The output coupling device couples sensor radiation (48) out of the utilized beam path and into a sensor beam path (49) that differs from the utilized beam path. The intensity sensor records an angularly resolved intensity distribution present at least at one point in the object plane of the optical imaging system, which intensity distribution reproduces the intensity of the electromagnetic radiation in dependence on the angle of incidence with respect to the object plane.