PACKAGE ASSEMBLY INCLUDING A SEMICONDUCTOR SUBSTRATE IN WHICH A FIRST PORTION OF A SURFACE OF THE SEMICONDUCTOR SUBSTRATE IS RECESSED RELATIVE TO A SECOND PORTION OF THE SURFACE OF THE SEMICONDUCTOR SUBSTRATE TO FORM A RECESSED REGION IN THE SEMICONDUCTOR SUBSTRATE

Embodiments of the present disclosure provide an apparatus comprising a semiconductor substrate having a first surface, a second surface that is disposed opposite to the first surface, wherein at least a portion of the first surface is recessed to form a recessed region of the semiconductor substrat...

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Bibliographische Detailangaben
Hauptverfasser: LIOU SHIANN-MING, WEI CHIENUAN, CHEN ROAWEN, WU ALBERT, CHANG RUNZI, WU SCOTT, HAN CHUNG CHYUNG (JUSTIN), CHENG CHUANNG
Format: Patent
Sprache:eng
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Zusammenfassung:Embodiments of the present disclosure provide an apparatus comprising a semiconductor substrate having a first surface, a second surface that is disposed opposite to the first surface, wherein at least a portion of the first surface is recessed to form a recessed region of the semiconductor substrate, and one or more vias formed in the recessed region of the semiconductor substrate to provide an electrical or thermal pathway between the first surface and the second surface of the semiconductor substrate, and a die coupled to the semiconductor substrate, the die being electrically coupled to the one or more vias formed in the recessed region of the semiconductor substrate. Other embodiments may be described and/or claimed.