Surface Inspecting Method

A surface inspecting method includes: irradiating an incident light beam of a first polarized state on a target object, the incident light beam comprising parallel light and having a cross-sectional area: measuring a second polarized state of a reflected light beam reflected from the target object;...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	JEON HYOUNG-JO, HORIE MASAHIRO, KO KANG-WOONG, HAN SANG-KYEONG, LEE SANG-KIL, RYU SUNG-YOON, SONG GIL-WOO, SOHN YOUNG-HOON, KO WOO-SEOK, YANG YU-SIN, AHN TAE-HEUNG, JEON BYEONG-HWAN
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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Beschreibung
Zusammenfassung:	A surface inspecting method includes: irradiating an incident light beam of a first polarized state on a target object, the incident light beam comprising parallel light and having a cross-sectional area: measuring a second polarized state of a reflected light beam reflected from the target object; and performing inspection on an entire area of the target object on which the incident light beam is irradiated, based on a variation between the first polarized state and the second polarized state.