DISPLAY INCLUDING SENSORS
This disclosure provides devices, systems and methods for providing MEMS display elements in a display region and MEMS sensors in a shelf region. In one aspect, a display device includes a first substrate with a display region and a shelf region extending from the display region, and a second substr...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | This disclosure provides devices, systems and methods for providing MEMS display elements in a display region and MEMS sensors in a shelf region. In one aspect, a display device includes a first substrate with a display region and a shelf region extending from the display region, and a second substrate over the display region and a portion of the shelf region. MEMS display elements can be in the display region and MEMS sensors can be in the covered portion of the shelf region. In some implementations, the MEMS sensors are formed simultaneously as the MEMS display elements. In some implementations, the MEMS sensors share at least two or more thin film layers with the MEMS display elements. In some implementations, the MEMS sensors are sealed by a hermetic seal and the MEMS display elements are sealed by a non-hermetic seal. |
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