INTEGRATED MULTIMODAL SENSOR DEVICE FOR INTRACRANIAL NEUROMONITORING

There is provided a monolithically integrated multimodal sensor device for intracranial neuromonitoring, the sensor device including: a single substrate; a temperature sensor formed on a first portion of the single substrate for detecting temperature; a pressure sensor formed on a second portion of...

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Bibliographische Detailangaben
Hauptverfasser:	CHAN WAI PAN, JE MINKYU, LIM RUIQI, TSAI JULIUS MING LIN, CHENG MING-YUAN, PARK MI KYOUNG, RAHMAN ABDUR RUB ABDUR, RAO JAI PRASHANTH, MARDUCCI MARGARITA SOFIA, GAO YUAN
Format:	Patent
Sprache:	eng
Schlagworte:	DIAGNOSIS HUMAN NECESSITIES HYGIENE IDENTIFICATION MEDICAL OR VETERINARY SCIENCE SURGERY
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Beschreibung
Zusammenfassung:	There is provided a monolithically integrated multimodal sensor device for intracranial neuromonitoring, the sensor device including: a single substrate; a temperature sensor formed on a first portion of the single substrate for detecting temperature; a pressure sensor formed on a second portion of the single substrate for detecting intracranial pressure; and an oxygen sensor formed on a third portion of the single substrate for detecting oxygen concentration. In particular, sensing portions of the temperature sensor, the oxygen sensor and the pressure sensor, respectively, are formed at different layers of the sensor device. There is also provided an integrated multimodal sensor system incorporating the sensor device and the associated methods of fabrication.