THIN FILM FABRICATING APPARATUS AND MANUFACTURING METHOD OF ORGANIC LIGHT EMITTING DEVICE USING THE SAME

THIN FILM FABRICATING APPARATUS AND MANUFACTURING METHOD OF ORGANIC LIGHT EMITTING DEVICE USING THE SAME

A thin film fabricating apparatus includes: an electrode bath which contains a thin film-forming material; a plurality of needle electrodes disposed in the electrode bath; a plurality of ring electrodes disposed on the electrode bath at positions corresponding to the needle electrodes; and a substra...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: NOBUO HAMAMOTO, HIROSHI MIYAZAKI
Format: Patent
Sprache:eng
Schlagworte:
APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
ATOMISING APPARATUS
ELECTRICITY
NOZZLES
PERFORMING OPERATIONS
SPRAYING APPARATUS
SPRAYING OR ATOMISING IN GENERAL
TRANSPORTING
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Beschreibung
Zusammenfassung:A thin film fabricating apparatus includes: an electrode bath which contains a thin film-forming material; a plurality of needle electrodes disposed in the electrode bath; a plurality of ring electrodes disposed on the electrode bath at positions corresponding to the needle electrodes; and a substrate stand disposed opposite to the needle electrodes and the ring electrodes, where the substrate stand holds the substrate, on which a thin film is to be formed.